MEMS scanner with 2D tilt, piston and focus motion

Lani, S; Bayat, D; Petremand, Y; Regamey, YJ; Onillon, E; Pierer, J; Grossmann, S

Lani, S (reprint author), CSEM, Jaquet Droz 1, Neuchatel, Switzerland.

MOEMS AND MINIATURIZED SYSTEMS XVI, 2017; 10116 ( ):

Abstract

A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of +/-15 degrees, a piston motio......

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