Atomic layer deposition for advanced nanomanufacturing-MedSci.cn

Atomic layer deposition for advanced nanomanufacturing

Cao, K; Liu, X; Yang, F; Chen, R

Chen, R (通讯作者)，Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China.

SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2022; 65 (9): 2218

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