Crystallization of GeTe phase change thin films grown by pulsed electron-beam deposition-MedSci.cn

Crystallization of GeTe phase change thin films grown by pulsed electron-beam deposition

Bathaei, N; Weng, BB; Sigmarsson, H

Bathaei, N (通讯作者)，Univ Oklahoma, Sch Elect & Comp Engn, Norman, OK 73019 USA.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2022; 148 ():

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