Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current-MedSci.cn

Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current

Zhang, ZH; Gan, WZ; Li, JJ; Kong, ZZ; Han, YC; Liu, Y; Wang, GL; Wu, ZH; Yu, JH; Zhang, QZ; Xu, GB; Zhang, YK; Xiang, JJ; Yin, HX; Luo, J; Wang, WW

Zhang, QZ; Yin, HX (通讯作者)，Chinese Acad Sci, Inst Microelect, Integrated Circuit Adv Proc Ctr ICAC, Beijing 100029, Peoples R China.