Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

He, WF; Yang, YH; Huang, SQ; Fan, SY; Hu, M; Wang, YC; Xu, W; Wang, L

Xu, W; Wang, L (corresponding author), Guangdong Acad Sci, Key Lab Guangdong Modern Surface Engn Technol, Natl Engn Lab Modern Mat Surface Engn Technol, Inst New Mat, Guangzhou 510650, Peoples R China.; Wang, L (corresponding author), Guangdong Univ Technol, Sch Mat & Energy, Guangzhou 510006, Peoples R China.

COATINGS, 2021; 11 (4):

Abstract

Tungsten carbide (WC) and Tungsten carbonitride (WCN) coatings are deposited by reactive high-power impulse magnetron sputtering (HiPIMS) with various......

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