Dielectric and thermodynamic properties of Ba-doped photoetchable glasses for three dimensional RF microsystem packaging-MedSci.cn

Dielectric and thermodynamic properties of Ba-doped photoetchable glasses for three dimensional RF microsystem packaging

Liang, TP; Zhang, JH; Chen, HW; Gao, LB; Harris, VG

Zhang, JH (corresponding author), Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Sichuan, Peoples R China.

CERAMICS INTERNATIONAL, 2021; 47 (10): 14226

Abstract

Photoetchable glasses (PEGs) are employed in packaging of radio frequency (RF) microsystems. However, their widescale adoption has been limited by int......

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