Influence of Mixture Composition on Electrophysical Parameters and Emission Spectra of Trifluoromethane Plasma with Oxygen and Argon

Pivovarenok, SA; Murin, DB; Grazhdyan, AY

Pivovarenok, SA (通讯作者),Ivanovo State Univ Chem & Technol, Ivanovo 153000, Russia.

HIGH ENERGY CHEMISTRY, 2023; 57 (2): 163

Abstract

The influence of the mixture composition on the electrophysical parameters and emission spectra of trifluoromethane plasma with oxygen and argon under......

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