Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures

Wang, XW; Huang, HC; Green, B; Gao, X; Rosenmann, D; Li, XL; Shi, JX

Shi, JX (corresponding author), Univ Illinois, Dept Elect & Comp Engn, Chicago, IL 60607 USA.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020; 38 (6):

Abstract

Au-free, Ti/Al/Ta ohmic contact on the AlGaN/AlN/GaN heterostructure using low annealing temperature is studied in this paper. With SiCl(4)plasma trea......

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