The self-driving photomask

Shiely, JP

Shiely, JP (reprint author), Synopsys Inc, 2025 NE Cornelius Pass Rd, Hillsboro, OR 97124 USA.

PHOTOMASK TECHNOLOGY 2018, 2018; 10810 ():

Abstract

Machine learning (ML) has become increasingly powerful and several recent works have demonstrated the capability of neural networks to achieve perform......

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