Concurrent wafer-level measurement of longitudinal and transverse effective piezoelectric coefficients (d(33,f) and e(31,f)) by double beam laser interferometry

Sivaramakrishnan, S; Mardilovich, P; Schmitz-Kempen, T; Tiedke, S

Sivaramakrishnan, S (reprint author), Xaar Plc, 316 Sci Pk, Cambridge CB4 0XR, England.

JOURNAL OF APPLIED PHYSICS, 2018; 123 (1):

Abstract

In a recently published paper [S. Sivaramakrishnan et al., Appl. Phys. Lett. 103, 132904 (2013)], the electrode-size dependence of the longitudinal ef......

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