MEMS cantilever based magnetic field gradient sensor

Dabsch, A; Rosenberg, C; Stifter, M; Keplinger, F

Dabsch, A (reprint author), Vienna Univ Technol, Inst Sensor & Actuator Syst Vienna, Gusshaustr 27-29, Vienna, Austria.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017; 27 (5):

Abstract

This paper describes major contributions to a MEMS magnetic field gradient sensor. An H-shaped structure supported by four arms with two circuit paths......

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