Extracting calibrated parameters from imaging ellipsometric measurement

Jin, LH; Tanaka, T; Kondoh, E; Gelloz, B; Uehara, M

Jin, LH (reprint author), Univ Yamanashi, Fac Engn, Kofu, Yamanashi 4008511, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2017; 56 (11):

Abstract

Ellipsometry is a standard metrology tool for measuring thin films and characterizing surfaces. As an extension of single-point ellipsometry, imaging ......

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