Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects

Rendon-Barraza, C; Chan, EA; Yuan, GH; Adamo, G; Pu, TC; Zheludev, NI

Rendon-Barraza, C (corresponding author), Nanyang Technol Univ, Ctr Disrupt Photon Technol, Sch Phys & Math Sci, Photon Inst, Singapore 637371, Singapore.

APL PHOTONICS, 2021; 6 (6):

Abstract

Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelen......

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