A physics-based model for LER-induced threshold voltage variations in double-gate MOSFET

Sriram, SR; Bindu, B

Bindu, B (corresponding author), Vellore Inst Technol VIT, Sch Elect Engn, Chennai, Tamil Nadu, India.

JOURNAL OF COMPUTATIONAL ELECTRONICS, 2020; 19 (2): 622

Abstract

The line-edge roughness (LER) has become one of the dominant sources of process variations in multi-gate transistors. The estimation of threshold volt......

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