Sub-micrometer pyroelectric tomography of AlScN films

Tappertzhofen, S; Bette, S; Sievers, F; Fichtner, S; Broker, S; Schmitz-Kempen, T

Tappertzhofen, S (corresponding author), TU Dortmund Univ, Dept Elect Engn & Informat Technol, Chair Micro & Nanoelect, Emil Figge Str 68, D-44227 Dortmund, Germany.

APPLIED PHYSICS LETTERS, 2021; 118 (24):

Abstract

We report on one- to three-dimensional characterization of the pyroelectric properties of aluminum scandium nitride. By means of the laser intensity m......

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