Flexible-substrate Fluxgate Current Sensor Based on MEMS Technology

Yang, SL; Fan, R

Yang, SL (corresponding author), North Minzu Univ, Sch Elect & Informat Engn, Yinchuan 750021, Ningxia, Peoples R China.

SENSORS AND MATERIALS, 2020; 32 (9): 3083

Abstract

A method of preparing a flexible-substrate fluxgate based on MEMS technology was proposed, and the prepared flexible-substrate fluxgate was applied as......

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