Defect characterization of MOCVD grown AlN/AlGaN films on sapphire substrates by TEM and TKD

O'Connell, JH; Lee, ME; Westraadt, J; Engelbrecht, JAA

Lee, ME (reprint author), Nelson Mandela Univ, Phys Dept, Ctr HRTEM, POB 77000, ZA-6031 Port Elizabeth, South Africa.

PHYSICA B-CONDENSED MATTER, 2018; 535 (): 293

Abstract

High resolution transmission electron microscopy (TEM) has been used to characterize defects structures in AlN/AlGaN epilayers grown by metal-organic ......

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