Effect of oxidation behavior on visible-infrared property of TiN films

Lu, LL; Xu, J; Liu, Y; Dong, J; Su, XL; Luo, F

Lu, LL; Xu, J (通讯作者)，Xian Polytech Univ, Sch Mat Sci & Engn, Xian 710048, Peoples R China.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2022; 33 (6): 3267

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