Subsurface-damaged layer in (010)-oriented beta-Ga2O3 substrates

Yamaguchi, H; Watanabe, S; Yamaoka, Y; Koshi, K; Kuramata, A

Yamaguchi, H (corresponding author), Natl Inst Adv Ind Sci & Technol, Adv Power Elect Res Ctr, 1-1-1 Umezono, Tsukuba, Ibaraki 3058568, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2020; 59 (12):

Abstract

Subsurface damage (SSD) in chemical mechanical polishing (CMP)-finished (010)-oriented beta-Ga2O3 substrates was investigated using optical microscopy......

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