Machine Learning for Fab Automated Diagnostics

Giollo, M; Lam, A; Gkorou, D; Liu, XL; van Haren, R

Giollo, M (reprint author), ASML Netherlands BV, Run 6501, NL-5504 DR Veldhoven, Netherlands.

33RD EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2017; 10446 ( ):

Abstract

Process optimization depends largely on field engineer's knowledge and expertise. However, this practice turns out to be less sustainable due to the f......

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