Transversely varying thickness-extensional modes in thin film bulk acoustic wave piezoelectric filters with interdigital electrodes-MedSci.cn

Transversely varying thickness-extensional modes in thin film bulk acoustic wave piezoelectric filters with interdigital electrodes

Liu, J; Du, JK; Wang, J; Yang, JS

Du, JK; Yang, JS (reprint author), Ningbo Univ, Sch Mech Engn & Mech, Piezoelect Device Lab, Ningbo, Zhejiang, Peoples R China.; Yang, JS (reprint author), Univ Nebraska, Dept Mech & Mat Engn, Lincoln, NE 68588 USA.

FERROELECTRICS LETTERS SECTION, 2019; 46 (1-3): 19

Abstract

We study free vibrations of thin-film bulk acoustic wave filters theoretically using the scalar differential equations by Tiersten and Stevens. The fi......

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