Energy Loss in a MEMS Disk Resonator Gyroscope

Xie, JB; Hao, YC; Yuan, WZ

Xie, JB (reprint author), Northwestern Polytech Univ, Sch Mech Engn, Xian 710072, Peoples R China.; Xie, JB (reprint author), Minist Educ, Key Lab Micro Nano Syst Aerosp, Xian 710072, Peoples R China.

MICROMACHINES, 2019; 10 (8):

Abstract

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism fo......

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