Mathematical model of using CVD technology

Burdonov, AE; Lukyanov, ND

Burdonov, AE (通讯作者),FSBEI Higher Educ INRTU, Dept Mineral Proc & Environm Protect, Tech Sci, St Lermontova 83, Irkutsk 664074, Russia.

SEPARATION SCIENCE AND TECHNOLOGY, 2023; 58 (8): 1552

Abstract

The relevance of the research is due to the acquisition of new knowledge about the optimization of the technological parameters of the operation of ce......

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