Transferable nano-patterned ALD membrane

Anwar, F; Tao, M; Schwartzberg, A; Ogletree, F; Altoe, MV; Raja, A; Cabrini, S

Anwar, F (通讯作者)，Lawrence Berkeley Natl Lab, Molecuar Foundry, 1 Cyclotron Rd, Berkeley, CA 94720 USA.

NANOTECHNOLOGY, 2023; 34 (34):

Abstract

We demonstrate fabrication of nano-patterned thin ALD (Atomic layer deposition) membrane (suspended/transferable) by using a bi-layer resist process w......

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