Substrate engineering for wafer-scale two-dimensional material growth: strategies, mechanisms, and perspectives

Zhao, TE; Guo, JX; Li, TT; Wang, Z; Peng, M; Zhong, F; Chen, Y; Yu, YY; Xu, TF; Xie, RZ; Gao, PQ; Wang, XR; Hu, WD

Gao, PQ (通讯作者),Sun Yat sen Univ, Sch Mat, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China.;Wang, Z; Hu, WD (通讯作者),Chinese Acad Sci, State Key Lab Infrared Phys, Shanghai Inst Tech Phys, 500 Yutian Rd, Shanghai 200083, Peoples R China.;Wang, XR (通讯作者),Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Sch Elect Sci & Engn, Natl Lab Solid State Microstruct, Nanjing, Peoples R China.;Wang, XR (通讯作者),Nanjing Univ, Sch Integrated Circuits, Suzhou, Peoples R China.;Wang, XR (通讯作者),Suzhou Lab, Suzhou, Peoples R China.

CHEMICAL SOCIETY REVIEWS, 2023; 52 (5): 1650

Abstract

The fabrication of wafer-scale two-dimensional (2D) materials is a prerequisite and important step for their industrial applications. Chemical vapor d......

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