Fabrication of nanopore and nanoparticle arrays with high aspect ratio AAO masks

Li, ZP; Xu, ZM; Qu, XP; Wang, SB; Peng, J; Mei, LH

Xu, ZM (reprint author), Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China.

NANOTECHNOLOGY, 2017; 28 (9):

Abstract

How to use high aspect ratio anodic aluminum oxide (AAO) membranes as an etching and evaporation mask is one of the unsolved problems in the applicati......

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