High-Consistency Optical Fiber Fabry-Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

Feng, F; Jia, PG; Qian, J; Hu, ZP; An, GW; Qin, L

Qin, L (corresponding author), North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China.

MICROMACHINES, 2021; 12 (6):

Abstract

This paper proposes a high-temperature optical fiber Fabry-Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing stru......

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