Design of micro-displacement amplifier for the micro-channel cooling system in the micro-pump

Zhang, YL; Li, DZ; Chen, Y; Zhang, B

Zhang, B (corresponding author), Shandong Univ, Sch Mech Elect & Informat Engn, Weihai 264209, Peoples R China.

FORSCHUNG IM INGENIEURWESEN-ENGINEERING RESEARCH, 2020; 84 (2): 161

Abstract

With the characteristic of small size, lightweight, low energy dissipation, the laminated piezoelectric is suitable for micro-electromechanical system......

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