A measurement free pre-etched pattern to identify the < 110 > directions on Si{110} wafer

Singh, SS; Avvaru, VN; Veerla, S; Pandey, AK; Pal, P

Singh, SS (reprint author), Indian Inst Technol Hyderabad, Dept Mech & Aerosp Engn, Kandi, Sangareddy, India.; Pal, P (reprint author), Indian Inst Technol Hyderabad, Dept Phys, Kandi, Sangareddy, India.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017; 23 (6): 2131

Abstract

In this paper, we present a self-aligning pre-etched pattern based technique to precisely determine the &lt; 110 &gt; direction on Si{110} wafer surfa......

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