16 x 16 Solar-Blind UV Detector Based on β-Ga2O3 Sensors

Shen, GH; Liu, Z; Zhang, ML; Guo, YF; Tang, WH

Liu, Z; Tang, WH (通讯作者)，Nanjing Univ Posts & Telecommun NJUPT, Coll Integrated Circuit Sci & Engn, Innovat Ctr Gallium Oxide Semicond IC GAO, Nanjing 210023, Jiangsu, Peoples R China.;Liu, Z; Tang, WH (通讯作者)，Nanjing Univ Posts & Telecommun NJUPT, Coll Integrated Circuit Sci & Engn, Natl & Local Joint Engn Lab RF Integrat & Microass, Nanjing 210023, Jiangsu, Peoples R China.

IEEE ELECTRON DEVICE LETTERS, 2023; 44 (7): 1140

Abstract

this work, a 16 x 16 Ga2O3 photodetector array is introduced. The Ga2O3 thin film was deposited on c-sapphire substrate by employing metal-organic che......

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