Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

Yu, Q; Zhang, YL; Shang, WJ; Dong, SC; Wang, C; Wang, Y; Liu, T; Cheng, F

Yu, Q (corresponding author), Huaqiao Univ, Coll Mech Engn & Automat, Xiamen 361021, Peoples R China.

PHOTONICS, 2021; 8 (5):