Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp-MedSci.cn

Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp

Jia, PF; Umezaki, R; Murata, J

Murata, J (通讯作者)，Ritsumeikan Univ, Dept Mech Engn, 1-1-1 Nojihigashi, Kusatsu, Shiga 5258577, Japan.

MICROELECTRONIC ENGINEERING, 2022; 257 ():

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