A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Xiang, C; Lu, YL; Cheng, C; Wang, JB; Chen, DY; Chen, J

Wang, JB; Chen, DY (corresponding author), Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100190, Peoples R China.; Wang, JB; Chen, DY (corresponding author), Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China.

MICROMACHINES, 2021; 12 (4):

Abstract

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a sili......

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