Optimization of FIB-SEM Tomography and Reconstruction for Soft, Porous, and Poorly Conducting Materials

Fager, C; Roding, M; Olsson, A; Loren, N; von Corswant, C; Sarkka, A; Olsson, E

Fager, C (corresponding author), Chalmers Univ Technol, Dept Phys, SE-41296 Gothenburg, Sweden.

MICROSCOPY AND MICROANALYSIS, 2020; 26 (4): 837

Abstract

Tomography using a focused ion beam (FIB) combined with a scanning electron microscope (SEM) is well-established for a wide range of conducting materi......

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