Generalized CVD Diagram of the Si-C-N-H-He(Ar) System

Shestakov, VA; Kosyakov, VI; Kosinova, ML

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY, 2020; 65 (6): 898

Abstract

Silicon carbonitride (SiCxNy) films have useful properties and thereby wide potential for practical use. Methods for the preparation of bulk and film ......

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