All-dielectric Deep Ultraviolet Metasurfaces

Zhang, C; Divitt, S; Fan, QB; Zhu, WQ; Agrawal, A; Xu, T; Lezec, HJ

Zhang, C (reprint author), NIST, Phys Measurement Lab, Gaithersburg, MD 20899 USA.; Zhang, C (reprint author), Univ Maryland, Maryland Nanoctr, College Pk, MD 20742 USA.

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019; ():

Abstract

We demonstrate low-loss all-dielectric metasurfaces operating down to a record-short deep-ultraviolet wavelength of 266 nm, with an efficiency of 60%.......

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