Hot-Pressing Deformation Yields Fine-Grained, Highly Dense and (002) Textured Ru Targets

Liu, SH; Xu, FS; Zhou, LM; Cui, H; Liu, MM; Wen, M; Wang, CJ; Wang, W; Li, S; Sun, XD

Liu, SH (通讯作者)，Northeastern Univ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Minist Educ, Shenyang 110819, Peoples R China.;Liu, SH (通讯作者)，Yunnan Precious Met Lab Co Ltd, State Key Lab Adv Technol Comprehens Utilizat Plat, Kunming 650106, Peoples R China.

MATERIALS, 2023; 16 (20):

Abstract

Ruthenium (Ru) is a refractory metal that has applications in the semiconductor industry as a sputtering target material. However, conventional powder......

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