Efficient aerosol assisted delivery of low-volatility precursor for CVD applications

Pasin, L; Meyer, J; Eiche, E; Weis, F; Kasper, G

Pasin, L (reprint author), KIT, Inst Mech Proc Engn & Mech, Str Forum 8, D-76131 Karlsruhe, Germany.

JOURNAL OF AEROSOL SCIENCE, 2018; 126 (): 180

Abstract

An improved lab-scale process for coating of carrier particles by aerosol assisted chemical vapor deposition (CVD) is described and characterized to p......

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