Ta-doped epitaxial beta-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD-MedSci.cn

Ta-doped epitaxial beta-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD

Wang, D; Ma, XC; Xiao, HD; Le, Y; Ma, J

Ma, J (corresponding author), Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China.; Ma, XC (corresponding author), Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021; 128 ():

Abstract

In this work, we successfully prepared epitaxial beta-Ga2O3 films with different Ta doping concentrations on SrTiO3(100) substrates. XPS measurement i......

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