Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition

Jang, Y; Jung, D; Sultane, PR; Larsen, ES; Bielawski, CW; Oh, J

Oh, J (通讯作者)，Yonsei Univ, Sch Integrated Technol, Incheon 21983, South Korea.;Oh, J (通讯作者)，Yonsei Inst Convergence Technol, Incheon 21983, South Korea.

APPLIED SURFACE SCIENCE, 2022; 572 ():

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