XPS investigation of the ALD Al2O3/HgCdTe heterointerface

Zakirov, ER; Kesler, VG; Sidorov, GY; Prosvirin, IP; Gutakovsky, AK; Vdovin, VI

Zakirov, ER (reprint author), Russian Acad Sci, Rzhanov Inst Semicond Phys, Siberian Branch, Pr Lavrentieva 13, Novosibirsk 630090, Russia.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2019; 34 (6):

Abstract

Metal-insulator-semiconductor (MIS) structures were fabricated on n-type variband HgCdTe with Al2O3 deposited by plasma-enhanced ALD. Early stages of ......

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