Effects of Downstream Plasma Exposure on beta-Ga2O3 Rectifiers

Xia, XY; Xian, MH; Fares, C; Ren, F; Kim, J; Kim, J; Tadjer, M; Pearton, SJ

Pearton, SJ (corresponding author), Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32608 USA.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2021; 10 (6):

Abstract

The effects of downstream plasma exposure with O-2, N-2 or CF4 discharges on Si-doped Ga2O3 Schottky diode forward and reverse current-voltage charact......

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