Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Liu, Y; Mu, EZ; Wu, ZH; Che, ZX; Sun, FY; Fu, XC; Wang, FD; Wang, XW; Hu, ZY

Hu, ZY (corresponding author), Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micronano Fabricat, Shanghai 200240, Peoples R China.; Hu, ZY (corresponding author), Shanghai Jiao Tong Univ, Inst Nanomicro Energy, Shanghai 200240, Peoples R China.; Hu, ZY (corresponding author), Shanghai Jiao Tong Univ, Dept Micronano Elect, Shanghai 200240, Peoples R China.

NANO CONVERGENCE, 2020; 7 (1):

Abstract

Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multi......

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