Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process

Kudo, S; Tokai, S; Yanagitani, T

Kudo, S (通讯作者)，Waseda Univ, Tokyo, Japan.;Kudo, S (通讯作者)，ZAIKEN, Tokyo, Japan.

2022 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS AND MECHANICS (IC-MAM), 2022; (): 86

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