Ca Silicide Films on Si(1 0 0) and Si(1 1 1) Substrates: Structure, Optical and Electrical Properties

Galkin, NG; Galkin, KN; Tupkalo, AV; Dotsenko, SA; Fogarassi, Z; Pecz, B

Galkin, NG (reprint author), Inst Automat & Control Proc FEB RAS, Opt & Electrophys Lab, Radio Str 5, Vladivostok 690041, Russia.

INTERNATIONAL JOURNAL OF NANOSCIENCE, 2019; 18 (3-4):

Abstract

The crystal structure, optical and electrical properties of Ca silicide films grown by MBE and RDE processes on Si(1 0 0) and Si(1 1 1) substrates hav......

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