Atmospheric pressure spatial ALD of Al2O3 thin films for flexible PEALD IGZO TFT application

Yoo, KS; Kim, DG; Lee, S; Lee, WB; Park, JS

Park, JS (通讯作者)，Hanyang Univ, Div Mat Sci & Engn, 222 Wangsimni ro, Seoul, South Korea.

CERAMICS INTERNATIONAL, 2022; 48 (13): 18803

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