Single-phase high-quality semipolar (10-13) AlN epilayers on m-plane (10-10) sapphire substrates

Shen, XQ; Kojima, K; Okumura, H

Shen, XQ (corresponding author), Natl Inst Adv Ind Sci & Technol, Adv Power Elect Res Ctr ADPERC, Tsukuba, Ibaraki 3058568, Japan.

APPLIED PHYSICS EXPRESS, 2020; 13 (3):

Abstract

Single-phase flat semipolar (10-13) AIN epilayers on m-plane (10-10) sapphire substrates grown by ammonia-free high-temperature metalorganic vapor pha......

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