AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Ai, YJ; Lv, HR; Huang, YL; He, JH; Wang, Y; Wu, JW; Zhang, Y

Zhang, Y (通讯作者)，Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.;Zhang, Y (通讯作者)，Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China.

IEEE SENSORS JOURNAL, 2023; 23 (8): 8261

Abstract

A surface acoustic wave (SAW) resonator with quality factors (Q) of 3526/10 205 at the resonant/antiresonant frequencies (f(r)/f(a)) has been fabricat......

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