A model of the vacuum level effect on the sensor response of vacuum sensors based on nanostructured semiconductor oxide materials

Pronin, IA; Yakushova, ND; Averin, IA; Karmanov, AA; Moshnikov, VA

Pronin, IA (reprint author), Penza State Univ, Dept Nano & Microelect, Penza 440026, Russia.

25TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY, 2018; 387 ():

Abstract

A mathematical model of the sensor response of vacuum sensors based on wideband gap semiconductor nanostructured oxides, using a small number of param......

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