Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration

Middelburg, LM; van Zeijl, HW; Vollebregt, S; Morana, B; Zhang, GQ

Middelburg, LM (corresponding author), Delft Univ Technol, Dept Microelect, NL-2628 CD Delft, Netherlands.

IEEE SENSORS JOURNAL, 2020; 20 (19): 11265

Abstract

This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog ......

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